CVD Polymers : fabrication of organic surfaces and devices by Karen K. Gleason

By Karen K. Gleason

The strategy of CVD (chemical vapor deposition) is a flexible strategy to fabricate high quality skinny movies and based surfaces within the nanometer regime from the vapor section. Already regular for the deposition of inorganic fabrics within the semiconductor undefined, CVD has turn into the strategy of selection in lots of purposes to approach polymers besides. This hugely scalable approach permits synthesizing high-purity, defect-free movies and for systematically tuning their chemical, mechanical and actual homes. additionally, vapor part processing is necessary for the deposition of insoluble fabrics together with fluoropolymers, electrically conductive polymers, and hugely crosslinked natural networks. in addition, CVD allows the coating of substrates which might in a different way dissolve or swell upon publicity to solvents.

The scope of the ebook encompasses CVD polymerization procedures which at once translate the chemical mechanisms of conventional polymer synthesis and natural synthesis in homogeneous drinks into heterogeneous techniques for the amendment of stable surfaces. The e-book is dependent into 4 components, complemented via an introductory review of the various approach suggestions for CVD of polymeric fabrics. the 1st half at the basics of CVD polymers is by way of an in depth insurance of the fabrics chemistry of CVD polymers, together with the most synthesis mechanisms and the consequent sessions of fabrics. The 3rd half makes a speciality of the functions of those fabrics akin to membrane amendment and gadget fabrication. the ultimate half discusses the possibility of scale-up and commercialization of CVD polymers

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The conductivity, transparency, and work function of oCVD PEDOT can be systematically tuned. Additionally, oCVD PEDOT can be grafted to its substrate for producing novel organic/inorganic hybrid interfaces as well as for ensuring resistance to delamination. Sufficient adhesion is essential for high-resolution lithographic patterning. 5 Vapor Deposition Polymerization (VDP) and Molecular Layer Deposition (MLD) Both VDP (vapor deposition polymerization) and MLD (molecular layer deposition) are useful for step growth polymers synthesized through condensation reactions [13, 16, 17].

D) References exclude reviews. e) References with comonomers are duplicated depending on which monomer in the comonomer series is cited first. f ) References in bold contain kinetic data. 2 iCVD of polytetrafluoroethylene. (a) Arrhenius plot of deposition rate versus filament temperature from using selfinitiated HFPO monomer [1]. Reprinted with permission from Ref. [1]. 8 (b) 103 /Tf (K−1) deposition rate versus filament temperature from using HFPO monomer and PFOSF initiator [19]. (Reprinted with permission from Ref.

Vml c (PM ∕PM,sat ) [ ] (1 − PM ∕PM,sat ) 1 − (1 − c) (PM ∕PM,sat ) ) ] [( where c ≈ exp ΔHdes − ΔHvap ∕(RT) Vad | = where ΔHdes is the heat of desorption, ΔHvap is the heat of vaporization, and Vml is the adsorbed volume of a monolayer. 950, respectively. 9 kJ mol−1 , which is indicative of physisorption (20–80 kJ mol−1 ) [196]. Since the surface conditions during deposition are dilute in monomer, the BET equation can first be simplified, which in the low concentration limit relates the surface monomer concentration [M] linearly to the PM ∕PM,sat ratio.

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